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Brand Name : HongJie
Certification : ISO 14001,ISO 9001,CE,EPA
Place of Origin : Shenzhen,China
MOQ : >1set
Price : US$168700~US$174500
Payment Terms : L/C,D/P,T/T,Western Union
Supply Ability : >300sets/month
Delivery Time : 1-7working days(depand on raw materials stocking)
Packaging Details : export standard wooden case
Water Quality : Resistivity ≥≥18.24 MΩ·cm
Flow Rate : 75m³/H (Customizable)
Core Process : Double-pass Reverse Osmosis + EDI + Polishing Resin
Key Components : RO Membrane Modules, EDI Units
Electricity Supply : 380V/22oV
After-Sales Service : 2-Year Warranty
Operation Mode : Fully Automatic
Product Features : Stable Water Quality,Low Operation Cost,Reliable Performance
Desalination : 99.5%
TOC : <0.1 ppb
Easy To Install Industrial Water Filter System 90t/H Ultra Pure Water System For Preparation Of Electronic-Grade Chemicals
I. Overview
Ultra-pure water is an indispensable raw material in the preparation of electronic-grade chemicals (such as high-purity etching solutions, photoresists, and CMP slurries). Its purity directly affects the control of metal impurities, particle size distribution, and batch stability in electronic chemicals.
In the preparation of electronic-grade chemicals, ultra-pure water is not only a solvent but also a molecular-level clean reaction environment (extreme purification, system anti-pollution, performance engine).
II. Process
Raw Water → Pretreatment: UF + Softening → Primary RO → Secondary RO → Membrane Degassing→ EDI → UV + TOC Degradation → Ultra - precision Mixed Bed( Nuclear - Grade Resin) → Terminal Ultrafiltration(0.01 μm )→ Nitrogen - Sealed Circulation
III. Ultra-pure water limit parameters (SEMI C63 standard)
Parameter | Standard Requirement | ||||
Resistivity (25°C) | ≥18.24 MΩ·cm | ||||
TOC | <0.1 ppb | ||||
Dissolved Oxygen (DO) | <0.5 ppb | ||||
Particles (≥0.05μm) | <0.5 particles/mL | ||||
Trace Metals | |||||
- Na⁺/K⁺ | ≤0.01 ppt | ||||
- Fe/Cu/Ni | ≤0.02 ppt | ||||
- B | ≤0.005 ppt | ||||
Anions (Cl⁻/SO₄²⁻) | ≤0.01 ppt |
IV. Application Scenarios
Wet electronic chemicals (hydrofluoric acid, ammonia water)
Lithography materials (EUV photoresist, developer)
CMP polishing slurry (silicon dioxide/cerium oxide slurry)
Electroplating solution (electroplating solution)
V. Here is a guideline for you to get a proper quotation
Tell us the raw water/source of water(tap water, well water, or sea water, etc)
Provide water analysis report(TDS , conductivity, or resistivity, etc)
Required production capacity( 5m³/H, 50m³/H,or 500m³/H, etc)
What's the pure water used for( industrial,Food and Beverage,or agriculture, etc )
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Easy To Install Industrial Water Filter System 90t/H Ultra Pure Water System Images |